ToupTek BSM – Modular SWIR Microscope (900-1700 nm) for Silicon See-Through Imaging

Name: ToupTek BSM - Modular SWIR Microscope (900-1700 nm) for Silicon See-Through Imaging
Brand: ToupTek
SKU: 17985

ToupTek BSM is a modular microscope operating in the short-wave infrared (900-1700 nm), extending classical optical microscopy beyond visible light. It combines sensitive SWIR cameras, dedicated optics, and modular illumination and mechanics – for non-destructive inspection in semiconductor manufacturing, materials science, and industry.

What is a SWIR microscope and why silicon penetration?

SWIR photon energy is lower than silicon’s bandgap, so the 900-1700 nm band penetrates silicon – allowing you to look beneath the surface of wafers, chips, and interconnects, revealing hidden cracks and defects. BSM does this using standard glass optics (cheaper and simpler than MWIR/LWIR reflective optics), integrating with conventional microscope platforms.

Key features

SWIR imaging 900-1700 nm, compatible with standard glass optics
Silicon penetration – non-destructive detection of subsurface defects
Coaxial Kohler illumination, LED 1550/1400/1300/1200 nm
M Plan Apo NIR 5x-50x HR objectives, resolution down to 0.4 µm
SWIR cameras 0.33-5 MP with built-in TEC, C-mount interface
Modular, precision CNC mechanics with vibration damping; tube configurations T100VA/T180VB/T090VA/T110VA

Technical specifications

Band	900-1700 nm (SWIR)
Capability	silicon penetration (subsurface defects)
Objectives	M Plan Apo NIR 5x-50x HR (down to 0.4 µm)
Illumination	coaxial Kohler, LED 1200-1550 nm
Cameras	SWIR 0.33-5 MP, TEC, C-mount
Mechanics	CNC, anti-vibration, modular
Tube configurations	T100VA / T180VB / T090VA / T110VA

Applications

Semiconductors – wafer and chip inspection (hidden cracks)
Materials science – subsurface contrast
Non-destructive industrial inspection
Inspection of electronic interconnects

Request a quote and configuration

We select ToupTek systems, objectives and adapters to match your microscope/camera and application. Contact Interlab for a quote and configuration guidance.